Semiconductor processing methods of forming hemispherical grain polysilicon layers, methods of forming capacitors, and capacitors

ABSTRACT

In one aspect of the invention, an amorphous layer of silicon is provided which has a gradient of thickness variation. The amorphous layer of silicon is transformed into a hemispherical grain polysilicon layer that has varying grain size therein. In another aspect of the invention, a material is provided and has an upper surface and inwardly tapered openings. A first electrically conductive electrode layer is formed within the openings and includes a plurality of hemispherical grain polysilicon layers. At least one of the hemispherical grain polysilicon layers has a grain size gradient defined by a smaller grain size in a region proximate the upper surface and a larger grain size beneath the region with the smaller grain size. An electrically insulative layer is formed over the first electrode layer and a second electrically conductive electrode layer is formed over the electrically insulative layer.

TECHNICAL FIELD

This invention relates to semiconductor processing methods of forminghemispherical grain polysilicon layers, methods of forming capacitors,and capacitors.

BACKGROUND OF THE INVENTION

As integration density of semiconductor memory devices increases, theseparation between adjacent memory cells decreases. Such decrease inseparation can cause shorting between adjacent devices.

FIG. 1 illustrates exemplary problems. A semiconductor wafer fragment 10comprises a bulk substrate 12 having diffusion regions 15 formedtherein. Diffusion regions 15 can be part of transistor constructions.Conductive plugs 14 are electrically connected to regions 15 and extendto capacitor constructions 13.

Capacitor constructions 13 comprise a storage node 20, which in theshown example is a hemispherical grain polysilicon (HSG) layer. Adielectric layer 22 is provided over the HSG layer 20 and a conductivelayer 24 is formed over dielectric layer 22. Conductive layer 24 definesa capacitor plate for capacitor constructions 13.

Close spacing of adjacent capacitor constructions 13 can inhibitconformal forming of layers 22 and 24, and lead to voids 26 being formedbetween adjacent capacitor constructions 13. Such voids 26 canundesirably alter dielectric properties at various regions of capacitorconstructions 13 relative to other regions of the capacitorconstructions 13.

Another problem that can be caused by the close spacing of capacitorconstructions 13 is short circuiting between adjacent devices.

Either of the above-discussed problems can detrimentally affect theperformance of the memory cells. Accordingly, it is desired to developnew methods of forming conductive devices, and in particular, it isdesired to develop new methods of forming capacitor constructions.

SUMMARY OF THE INVENTION

In one aspect of the invention, an amorphous layer of silicon isprovided which has a gradient of thickness variation. The amorphouslayer of silicon is transformed into a hemispherical grain polysiliconlayer that has varying grain size therein.

In another aspect of the invention, an opening is formed in a materialand the opening has inwardly sloped walls. A plurality of hemisphericalgrain polysilicon layers are formed within the opening and thehemispherical grain polysilicon layers extend from a lower portion ofthe opening to an upper portion. At least one hemispherical grainpolysilicon layer has a grain size which increases at the lower portionof the opening relative to a grain size of the hemispherical grainpolysilicon layer at the upper portion of the opening.

In still another aspect of the invention, a material is provided and hasan upper surface and inwardly tapered openings. A first electricallyconductive electrode layer is formed within the openings and the firstelectrode layer includes hemispherical grain polysilicon. The firstelectrode layer has terminal ends that form an upper surface proximatethe upper surface of the material. The hemispherical grain polysiliconhas a grain size gradient defined by a smaller grain size at theterminal ends and a larger grain size beneath the upper surface. Anelectrically insulative layer is formed over the first electrode layerand a second electrically conductive electrode layer is formed over theelectrically insulative layer.

In yet another aspect of the invention, a material with an openingtherein has a first electrically conductive electrode layer ofhemispherical grain polysilicon within the opening. The hemisphericalgrain polysilicon has a portion proximate an upper surface of thematerial. The hemispherical grain polysilicon has a grain size gradientdefined by a smaller grain size at the portion proximate the uppersurface and a larger grain size at another portion below the portionproximate the upper surface. An electrically insulative layer extendsover the first electrode layer and a second electrically conductiveelectrode layer extends over the electrically insulative layer.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a fragmentary sectional view of a prior art semiconductorsubstrate.

FIG. 2 is a fragmentary sectional view of a semiconductor substrate atone processing step in accordance with a first embodiment of theinvention.

FIG. 3 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 2.

FIG. 4 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 3.

FIG. 5 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 4.

FIG. 6 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 5.

FIG. 7 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 6.

FIG. 8 is a view of the FIG. 2 substrate fragment shown at a processingstep subsequent to that of FIG. 7.

FIG. 9 is a fragmentary sectional view of a semiconductor substrate at aprocessing step in accordance with a second embodiment of the invention.

FIG. 10 is a view of the FIG. 9 substrate fragment shown at a processingstep subsequent to that of FIG. 9.

FIG. 11 is a view of the FIG. 9 substrate fragment shown at a processingstep subsequent to that of FIG. 10.

FIG. 12 is a view of the FIG. 9 substrate fragment shown at a processingstep subsequent to that of FIG. 11.

FIG. 13 is a view of the FIG. 9 substrate fragment shown at a processingstep subsequent to that of FIG. 12.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws "to promote the progressof science and useful arts" (Article 1, Section 8).

To aid in interpretation of the claims that follow, the terms"semiconductive substrate" and "semiconductor substrate" are defined tomean any construction comprising semiconductive material including, butnot limited to, bulk semiconductor materials such as a semiconductivewafer (either alone or in assemblies comprising other materialsthereon), and semiconductive material layers (either alone or inassemblies comprising other materials). The term "substrate" refers toany supporting structure, including, but not limited to, thesemiconductive substrates described above.

With reference to FIGS. 2-13, exemplary embodiments of the presentinvention are illustrated. Referring to FIG. 2, a semiconductivesubstrate fragment in process is indicated generally by reference 40.Such comprises a bulk substrate region 42, having diffusion regions 45therein. Conductive pillars, or plugs, 44 are formed in electricalcommunication with diffusion regions 45. Diffusion regions 45 can be,for example, source/drain regions of a transistor. An insulativematerial 43 (which can comprise, for example, borophosphosilicate glass(BPSG)) is provided over substrate 42.

A plurality of openings 46 are formed within material 43, and material43 forms a first upper surface 54. Exemplary spacing between theopenings 46 comprises a distance of from about 800 Angstroms to about1,000 Angstroms. Openings 46 extend to conductive plugs 44. The shownplugs 44 can be eliminated in other embodiments (not shown), andopenings 46 could extend entirely to diffusion regions 45. Openings 46have a width which tapers from a first dimension to a second dimensionsuch that the second dimension is smaller than the first dimension. Forexample, as openings 46 extend into material 43 from first upper surface54, walls 47 of the openings 46 slope or converge inwardly to formtapered walls 47. An exemplary method of forming openings 46 is byexposing material 43 to etching conditions. The sloped or tapered walls47 are a common result of forming openings 46 because the upper surface54 is exposed to the etching conditions for a longer duration of timethan portions of material 43 elevationally below the upper surface 54.

Referring to FIG. 3, a layer 48 of amorphous silicon is formed along thetapered walls 47 of openings 46 and over the first upper surface 54. Anexemplary layer 48 has a thickness of from about 250 Angstroms to about800 Angstroms. In one aspect of the invention, the layer 48 of amorphoussilicon comprises an undoped layer that is about 500 Angstroms thick. Inanother aspect of the invention, layer 48 of amorphous silicon can beprocessed to vary its thickness thereby improving or optimizing thedesign of a capacitor construction, i.e., by varying the size, pitch,and/or taper of a capacitor component.

Referring to FIG. 4, a layer 52 of doped polycrystalline silicon(polysilicon) is formed over layer 48 of amorphous silicon. Dopedpolysilicon layer 52 is provided to a thickness which fills openings 46.

Referring to FIG. 5, portions of doped polysilicon layer 52 andamorphous silicon layer 48 are removed to form a second upper surface55. An exemplary process to form the second upper surface 55 comprises achemical-mechanical polishing (CMP) process to etch back amorphoussilicon layer 48 and doped polysilicon layer 52. In one aspect of theinvention, layer 48 and layer 52 are etched back to surface 54 (FIG. 4).

Referring to FIG. 6, second upper surface 55 is exposed to etchingconditions such that amorphous silicon layer 48 is etched selectivelyrelative to BPSG material 43. The etching conditions comprise, forexample, a buffered oxide etch which etches amorphous silicon layer 48at a slower rate than BPSG material 43. A suitable etch utilizes asolution comprising hydrofluoric acid (HF) (assay of 49 percent) diluted(buffered) with ammonium fluoride (NH₄ F) and comprises exposure to suchsolution at 21° C. for approximately 25 minutes. Such etching conditionscan etch amorphous silicon layer 48 at a removal rate of about 11Angstroms per minute, and can etch BPSG material 43 at a removal rate ofabout 280 Angstroms per minute.

The etching of material 43 forms recesses 56 therein and a third uppersurface 60 elevationally below second upper surface 55. In one aspect ofthe invention, only a portion of BPSG substrate 43 is removed to leaveroom beneath the third upper surface 60 for word lines, digit lines, orother circuit components (not shown) which may have been formed byprevious processing. The tapered walls 47 (shown in phantom) etch backto form a wall 59 of amorphous silicon layer 48, with wall 59 being morevertical than previous wall 47. The etched amorphous silicon layer 48has a gradient of thickness, and specifically is thinner at a firstregion 65 proximate upper surface 55 than at a second region 67 belowthe first region 65. An exemplary gradient progression wouldcontinuously increase between the smaller thickness and largerthickness. The shown etching conditions also remove a small portion ofdoped polysilicon layer 52 to form shallow divots 61.

Referring to FIG. 7, amorphous silicon layer 48 is converted into ahemispherical grain polysilicon (HSG) layer 70. Such conversion can beaccomplished, for example, by placing substrate 42 in a low pressurechamber to subject substrate 42 to a thermal process under conditions toseed amorphous silicon layer 48 with disilane and then subject the sameto annealing temperatures. Exemplary thermal processing includesconventional thermal processing and rapid thermal processing (RTP).Next, doped polysilicon layer 52 is subjected to conditions toout-diffuse dopant from doped polysilicon layer 52 into HSG layer 70.Exemplary dopant sources for polysilicon layer 52 are phosphine (PH₃)and arsine (AsH₃). The grain size of the HSG layer 70 varies from asmaller grain size at a first region 68 proximate upper surface 55, to alarger grain size at a second region 69 below the first region 68. Anexemplary gradient progression would continually increase between thesmaller grain size to the larger grain size.

In one aspect of the invention, the HSG layer 70 comprises a capacitorstorage node. Portions of HSG layers 70 represented by first regions 68are spaced a greater distance from adjacent first regions 68 of HSGlayers 70 than if the etch of FIG. 6 had not been performed.Accordingly, potential for short circuiting between the nodes isreduced. Additionally, the larger grain size in second regions 69maximizes surface area of the capacitor storage nodes to increase thestorage capacity of the node where short circuiting may not be such aproblem.

Referring to FIG. 8, a dielectric layer 80 is formed over the dopedpolysilicon layer 52, HSG layer 70 and material 43 to fill recesses 56.Dielectric layer 80 can comprise, for example, one or more of silicondioxide, silicon nitride, tantalum pentoxide (Ta₂ O₅) or bariumstrontium titantate (BaSrTiO₃). An electrically conductive layer 82 isformed over dielectric layer 80 to define capacitor constructions 84.Electrically conductive layer 82 can comprise, for example, one or moreof titanium nitride (TiN), tungsten nitride (WN), platinum (Pt), orpolysilicon.

Another embodiment of the present invention is described with referenceto FIGS. 9-13. Like numerals from the first described embodiment areemployed where appropriate, with differences being indicated with thesuffix (a) or different numerals.

Referring to FIG. 9, a semiconductor substrate fragment in process isindicated generally with reference numeral 40a. Such is shown at aprocessing step subsequent to that of FIG. 2 and comprises a pluralityof openings 46 with three layers 48, 90, 92 formed therein and overmaterial 43. An exemplary material 43 comprises BPSG. In the shownembodiment, openings 46 are not completely filled, leaving voids 50defined by inner walls 58. Layer 48 comprises a first layer of amorphoussilicon, layer 90 comprises doped polysilicon, and layer 92 comprises asecond layer of amorphous silicon. Each of layers 48, 90 and 92 cancomprise a thickness of, for example, about 500 Angstroms.

Referring to FIG. 10, layers 48, 90 and 92 are planarized to form afirst upper surface 55. An exemplary method for such planarization ischemical-mechanical polishing. The planarization can also remove some ofmaterial 43.

Referring to FIG. 11, first upper surface 55 (FIG. 10) is exposed toetching conditions such that amorphous layers of silicon 48 areselectively etched relative to BPSG material 43. In one aspect of theinvention, the etching conditions comprise, for example, a bufferedoxide etch which etches amorphous silicon layer 48 at a slower rate thanBPSG material 43. A suitable etch utilizes a solution comprisinghydrofluoric acid (HF) (assay of 49 percent) diluted (buffered) withammonium fluoride (NH₄ F) and comprises exposure to such solution at 21°C. for approximately 25 minutes. Such etching conditions can etchamorphous silicon layer 48 at a removal rate of about 11 Angstroms perminute, and can etch BPSG material 43 at a removal rate of about 280Angstroms per minute.

Etched material 43 defines recesses 56 and a second upper surface 60elevationally below first upper surface 55. The tapered walls 47 ofamorphous silicon layer 48 (shown in phantom) are etched back to form awall 59 more vertical than walls 47. The etched amorphous silicon layer48 has a gradient of thickness, and specifically is thinner at a firstregion 65 proximate upper surface 55 than at a second region 67 belowthe first region 65. An exemplary gradient progression wouldcontinuously increase between the smaller thickness and largerthickness. The dimensions of voids 50 are increased when secondamorphous silicon layer 92 is etched back to form inner walls 63.

Referring to FIG. 12, amorphous silicon layers 48 and 92 are convertedinto hemispherical grain polysilicon (HSG) layers 70 and 94,respectively, by, for example, placing substrate 42 in an Integral Promachine under conditions to seed amorphous silicon layers 48 and 92 withdisilane and then subject the same to annealing temperatures. Next,doped polysilicon layer 90 is subjected to conditions to out diffusedopant from same into the HSG layers 70 and 94. The grain size of theHSG layer 70 varies from a smaller grain size at a first region 68proximate upper surface 55, to a larger grain size at a second region 69below the first region 68. An exemplary gradient progression wouldcontinuously increase between the smaller grain size to the larger grainsize.

Referring to FIG. 13, a dielectric layer 80 is formed over dopedpolysilicon layer 90, HSG layers 70 and 94 and material 43 to fill voids50 and recesses 56. Dielectric layer 80 can comprise, for example, oneor more of silicon dioxide, silicon nitride, tantalum pentoxide (Ta₂ O₅)or barium strontium titantate (BaSrTiO₃). An electrically conductivelayer 82 is formed over dielectric layer 80 to define capacitorconstructions 84. Electrically conductive layer 82 can comprise, forexample, one or more of titanium nitride (TiN), tungsten nitride (WN),platinum (Pt), or polysilicon.

While the shown embodiment deals with methods and processing to formcapacitor structures, it should be understood that subject matter of thepresent application, for example, providing an amorphous layer ofsilicon having a gradient of thickness variation and transforming theamorphous layer of silicon into a hemispherical grain polysilicon layerhaving varying grain size therein, is applicable for methods andprocesses to construct conductive components and devices having smallfeature sizes.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

What is claimed is:
 1. A semiconductor processing method of forming ahemispherical grain polysilicon layer, comprising:providing an amorphouslayer of silicon having a gradient of thickness variation; andtransforming the amorphous layer of silicon into a hemispherical grainpolysilicon layer having varying grain size therein.
 2. Thesemiconductor processing method of claim 1 further comprising providinga material having an upper surface with the amorphous layer of siliconhaving a smaller thickness in a region proximate the upper surface and alarger thickness in a region below the region with the smallerthickness.
 3. The semiconductor processing method of claim 1 furthercomprising:providing the amorphous layer of silicon within an opening ina material having an upper surface; and wherein the hemispherical grainpolysilicon layer comprises a grain size gradient defined by a smallergrain size in a region proximate the upper surface and a larger grainsize in a region below the region with the smaller grain size.
 4. Thesemiconductor processing method of claim 3 wherein the grain sizegradient continually increases between the smaller and larger grainsizes.
 5. A method of forming hemispherical grain polysilicon inconvergingly tapered openings, comprising:forming a layer of amorphoussilicon within plural openings, the openings having a width which tapersfrom a first dimension to a second dimension, the second dimension beingsmaller than the first dimension, and a thickness of the layerincreasing as the openings dimension decreases; and subsequentlyconverting the layer of amorphous silicon to hemispherical grainpolysilicon.
 6. The method of claim 5 further comprising:forming a dopedpolysilicon layer over the hemispherical grain polysilicon; andsubjecting the doped polysilicon layer to conditions which out-diffuseat least one dopant from the doped polysilicon layer into thehemispherical grain polysilicon.
 7. The method of claim 5 wherein theopenings are formed within a material having an upper surface and thelayer of amorphous silicon comprises a smaller thickness in a regionproximate the upper surface and a larger thickness in a region below theregion with the smaller thickness.
 8. The method of claim 5 whereinforming the amorphous layer of silicon comprises selectively etching amaterial at a greater rate than the amorphous layer; and wherein agreater portion of amorphous layer is removed from a first region of theamorphous layer proximate an upper surface of the material relative asecond region of the layer which is beneath the first region.
 9. Themethod of claim 8 wherein the material comprises borophosphosilicateglass and the selectively etching comprises a buffered oxide etch.
 10. Amethod of forming hemispherical grain polysilicon layer,comprising:forming an opening in a material, the opening having inwardlysloped walls; and forming a hemispherical grain polysilicon layer withinthe opening, the hemispherical grain polysilicon layer extending from alower portion of the opening to an upper portion; the hemisphericalgrain polysilicon layer having a grain size which increases at the lowerportion of the opening relative to a grain size of the hemisphericalgrain polysilicon layer at the upper portion of the opening.
 11. Themethod of claim 10 wherein the forming the hemispherical grainpolysilicon layer comprises converting an amorphous layer of silicon tothe hemispherical grain polysilicon layer; the amorphous layer ofsilicon comprising a thickness which is greater at the lower portion ofthe opening than at the upper portion of the opening.
 12. The method ofclaim 10 wherein the forming the hemispherical grain polysilicon layercomprises:forming an amorphous layer of silicon within the opening andalong the sloped walls, the amorphous layer of silicon having asubstantially constant thickness from the upper portion of the openingto the lower portion of the opening; etching the amorphous layer ofsilicon to alter a thickness of at least a portion of the amorphouslayer of silicon; after the etching, the thickness of the layer ofamorphous silicon being greater at the lower portion of the opening thanat the upper portion of the opening; and transforming the amorphouslayer of silicon into the hemispherical grain polysilicon layer.
 13. Themethod of claim 10 further comprising:forming a doped polysilicon layerover the hemispherical grain polysilicon layer; and subjecting the dopedpolysilicon layer to conditions which out-diffuse at least one dopantfrom the doped polysilicon layer into the hemispherical grainpolysilicon layer.
 14. A method of forming hemispherical grainpolysilicon layers, comprising:forming an opening in a material, theopening having inwardly sloped walls; and forming a plurality ofhemispherical grain polysilicon layers within the opening, thehemispherical grain polysilicon layers extending from a lower portion ofthe opening to an upper portion; at least one hemispherical grainpolysilicon layer having a grain size which increases at the lowerportion of the opening relative to a grain size of the hemisphericalgrain polysilicon layer at the upper portion of the opening.
 15. Themethod of claim 14 wherein the hemispherical grain polysilicon layersare separated by an intervening layer comprising conductively dopedpolycrystalline silicon.
 16. The method of claim 14 wherein thehemispherical grain polysilicon layers comprise a thickness of about 500Angstroms.
 17. The method of claim 14 further comprising:forming a dopedpolysilicon layer between the hemispherical grain polysilicon layers;and subjecting the doped polysilicon layer to conditions whichout-diffuse at least one dopant from the doped polysilicon layer intothe hemispherical grain polysilicon layers.
 18. The method of claim 14wherein the forming the hemispherical grain polysilicon layers comprisesconverting an amorphous layer of silicon to a hemispherical grainpolysilicon layer; at least one amorphous layer of silicon comprising athickness which is greater at the lower portion of the opening than atthe upper portion of the opening.
 19. The method of claim 18 wherein theforming the hemispherical grain polysilicon layers comprises:formingfirst and second amorphous layers of silicon within the opening andalong the sloped walls, the first and second amorphous layers of siliconhaving a substantially constant thickness from the upper portion of theopening to the lower portion of the opening; etching the first andsecond amorphous layers of silicon to alter a thickness of at least aportion of the first amorphous layer of silicon; after the etching, thethickness of the first layer of amorphous silicon being greater at thelower portion of the opening than at the upper portion of the openingand the thickness of the second layer of amorphous silicon beinggenerally the same thickness throughout; and transforming the amorphouslayer of silicon into the hemispherical grain polysilicon layer.
 20. Amethod of forming one or more capacitors comprising:providing a materialhaving an upper surface and inwardly tapered openings; forming a firstelectrically conductive electrode layer within the openings; the firstelectrode layer comprising hemispherical grain polysilicon havingterminal ends forming an upper surface proximate the upper surface ofthe material; the hemispherical grain polysilicon comprising a grainsize gradient defined by a smaller grain size at the terminal ends and alarger grain size beneath the upper surface; forming an electricallyinsulative layer over the first electrode layer; and forming a secondelectrically conductive electrode layer over the electrically insulativelayer.
 21. A method of forming one or more capacitorscomprising:providing a material with openings extending to conductiveplugs within the material; the openings having inwardly tapered wallsrelative an upper surface of the material and extending from the uppersurface to the conductive plugs; forming a layer of amorphous siliconalong the tapered walls of the openings; forming a layer of dopedpolysilicon over the layer of amorphous silicon; the layer of dopedpolysilicon filling the openings; etching the layer of amorphoussilicon; after the etching, the layer of amorphous silicon comprises asmaller thickness in a region proximate the upper surface and a largerthickness in a region below the region with the smaller thickness;converting the layer of amorphous silicon into hemispherical grainpolysilicon; subjecting the doped polysilicon to conditions whichout-diffuse dopant from the doped polysilicon into the hemisphericalgrain polysilicon; forming a dielectric layer over the dopedpolysilicon, hemispherical grain polysilicon and material; and formingan electrically conductive layer over the dielectric layer.
 22. Themethod of forming capacitors of claim 21 wherein the grain size of thehemispherical grain polysilicon comprises a smaller grain size near theupper surface of the material and a larger grain size along the taper ofthe openings.
 23. The method of forming capacitors of claim 21 whereinthe etching comprises a buffered oxide etch.
 24. A method of forming oneor more capacitors comprising:providing a material having an uppersurface and inwardly tapered openings; forming a first electricallyconductive electrode layer within the openings; the first electrodelayer comprising a plurality of hemispherical grain polysilicon layers;at least one of the hemispherical grain polysilicon layers comprising agrain size gradient defined by a smaller grain size in a regionproximate the upper surface and a larger grain size beneath the regionwith the smaller grain size; forming an electrically insulative layerover the first electrode layer; and forming a second electricallyconductive electrode layer over the electrically insulative layer.
 25. Amethod of forming one or more capacitors comprising:providing a materialwith openings extending to conductive plugs within the material; theopenings having inwardly tapered walls relative an upper surface of thematerial and extending from the upper surface to the conductive plugs;forming a first layer of amorphous silicon along the tapered walls ofthe openings; forming a layer of doped polysilicon over the first layerof amorphous silicon; forming a second layer of amorphous silicon overthe layer of doped polysilicon; etching the layers of amorphous silicon;after the etching, at least one of the layers of amorphous siliconcomprises a smaller thickness in a region proximate the upper surfaceand a larger thickness in a region below the region with the smallerthickness; converting the layers of amorphous silicon into hemisphericalgrain polysilicon layers; subjecting the layer of doped polysilicon toconditions which out-diffuse dopant from the doped polysilicon into thehemispherical grain polysilicon layers; forming a dielectric layer overthe layer of doped polysilicon, hemispherical grain polysilicon layersand material; and forming an electrically conductive layer over thedielectric layer.
 26. A capacitor comprising:a material having anopening therein; a first electrically conductive electrode layer withinthe opening, the first electrically conductive electrode layercomprising hemispherical grain polysilicon and having a portionproximate an upper surface of the material, the hemispherical grainpolysilicon comprising a grain size gradient defined by a smaller grainsize at the portion proximate the upper surface and a larger grain sizeat another portion below the portion proximate the upper surface; anelectrically insulative layer extending over the first electrode layer;and a second electrically conductive electrode layer extending over theelectrically insulative layer.
 27. The capacitor of claim 26 furthercomprising a conductively doped polysilicon layer in between the firstelectrode layer and electrically insulative layer.
 28. A capacitorcomprising:a material with an upper surface having an opening therein; afirst electrically conductive electrode layer within the opening, thefirst electrically conductive electrode layer comprising a first layerof hemispherical grain polysilicon over the material, a layer of dopedpolysilicon over the first layer, and a second layer of hemisphericalgrain polysilicon over the layer of doped polysilicon; the first layerof hemispherical grain polysilicon having a grain size gradient definedby a smaller grain size in a region proximate the upper surface and alarger grain size in a region below the region with the smaller grainsize; an electrically insulative layer extending over the firstelectrode layer; and a second electrically conductive electrode layerextending over the electrically insulative layer.